Lasertec hybrid confocal microscope combines laser and white light sources

May 14, 2017
Source: ASM International

 Lasertec, Japan, introduces the Optelics Hybrid confocal microscope, in which laser and white light sources are combined in one body, for a multi-functional high-performance confocal microscope. The two sets of confocal optics are combined with additional functions, including an interferometer, differential interference contrast observation, and spectroscopic reflectometry film thickness measurement.

The 405-nm laser enables high-magnification and high-resolution observation, for clear visualization of extremely fine-structured samples. The field of view is approximately 1.6 times wider than that of the average scanning laser microscope, for higher operation efficiency. Optical interferometry, spectroscopic reflectometer, and an atomic force microscope are available for measurement of nanometer-scale structures (AFM is optional).

A wavelength can be selected from six different wavelengths for optimum observation and measurement of each sample. Color confocal optics provides high-resolution full-color images with high depth of field. Observation and measurement is possible for many different samples, including semiconductor materials and devices, transparent films, ITO films, MEMS, coating materials and films, inorganic and organic materials, biological samples, metal parts, and plastic parts.

Optelics Hybrid is a highly versatile microscope with high magnification and resolution capability and wide field of view, while it can perform topography and film thickness measurements using optical interferometry and spectroscopic reflectometry.


Subject Classifications

Materials Properties and Performance