{"id":4099,"date":"2016-08-20T19:14:32","date_gmt":"2016-08-20T19:14:32","guid":{"rendered":"https:\/\/staging.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/26759305\/NEWS\/"},"modified":"2023-02-07T04:53:01","modified_gmt":"2023-02-07T04:53:01","slug":"e-beam-wafer-inspection-system-provides-high-resolution-fast-throughput","status":"publish","type":"post","link":"https:\/\/www.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/26759305\/NEWS\/","title":{"rendered":"E-beam wafer inspection system provides high resolution, fast throughput"},"content":{"rendered":"<p>\n\tApplied Materials Inc., Santa Clara, Calif., announces that its next-generation ProVision e-beam wafer inspection system delivers the highest resolution and image quality at the fastest throughput, to foundry, logic, DRAM and 3D NAND customers as they move to advanced nodes.<\/p>\n<p>\n\tThe ProVision system is said to be the only e-beam hotspot inspection with one nanometer resolution. This allows customers to detect the most challenging &#8220;killer&#8221; defects that other technologies cannot find, and to monitor process marginality to rapidly resolve ramp issues and achieve higher yields.<\/p>\n<p>\n\tOffering three times faster throughput over existing e-beam hotspot inspection tools, the system ensures accurate process characterization, prediction, and detection of performance defects and yield-limiting defects throughout the fab product life cycle. It complements Applied&#8217;s e-beam metrology and review products, as well as the optical patterned wafer inspection product line.<\/p>\n<p style=\"font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; line-height: 1.33333em;\">\n\t<span style=\"font-weight: 400; font-size: 0.9375em; line-height: 1.33333em; font-family: Helvetica, Arial, sans-serif;\">&nbsp;<\/span><span style=\"font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: normal; font-size: 14.0625px; line-height: 18.75px; font-family: Helvetica, Arial, sans-serif;\">The ProVision system is gaining momentum with already more than a dozen shipments, including repeat orders from a leading foundry and a major memory manufacturer. Additional systems are scheduled for shipment to existing and new customers in the second half of 2016.<\/span><\/p>\n<div>\n\t<a href=\"http:\/\/www.appliedmaterials.com\/\" style=\"font-family: Helvetica, Arial, sans-serif; font-size: 0.9375em; line-height: 1.33333em;\">www.appliedmaterials.com<\/a><span style=\"font-family: Helvetica, Arial, sans-serif; font-weight: 400; font-size: 0.9375em; line-height: 1.33333em;\">&nbsp;<\/span><\/div>\n<p>\n\t&nbsp;<\/p>\n<p>\n\t&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Applied Materials Inc., Santa Clara, Calif., announces that its next-generation ProVision e-beam wafer inspection system delivers the highest resolution and image quality at the fastest throughput to foundry, logic, DRAM, and 3D NAND customers as they move to advanced nodes.<\/p>\n","protected":false},"author":63082,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[434,450,435,436,1],"tags":[],"class_list":["post-4099","post","type-post","status-publish","format-standard","hentry","category-electronics","category-general","category-news","category-news-articles","category-uncategorized"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - 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