{"id":4116,"date":"2016-07-25T21:26:21","date_gmt":"2016-07-25T21:26:21","guid":{"rendered":"https:\/\/staging.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/26712310\/NEWS\/"},"modified":"2023-02-07T04:53:02","modified_gmt":"2023-02-07T04:53:02","slug":"hitachi-conductor-etch-system-supports-double-patterns-and-3d-structures","status":"publish","type":"post","link":"https:\/\/www.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/26712310\/NEWS\/","title":{"rendered":"Hitachi Conductor etch system supports double patterns and 3D structures"},"content":{"rendered":"<p>\n\tHitachi High-Tech, Schaumburg, Ill., has developed the 9000 Conductor Etch Series to support next-generation devices at 20 nm and below that require double-patterning, 3D structures, and complex, high-precision processes. These processes include protective layer formation and finishing techniques for new materials. The new HHT 9000 platform utilizes Hitachi&#8217;s proprietary low-contaminant, high-speed transfer system for high productivity.<\/p>\n<p>\n\tThe linked common platform permits process flexibility and future expansion through its modular chamber design. Platform and user interface standardization will facilitate a smooth transition to 450-mm wafer sizes. The 9000 platform incorporates HHT&#8217;s new microwave ECR (Electron Cyclotron Resonance) plasma etching chamber that has been proven in high-volume manufacturing usage.<\/p>\n<p>\n\t<a href=\"http:\/\/www.hitachi-hightech.com\/\">www.hitachi-hightech.com<\/a><\/p>\n<p>\n\t&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Hitachi High-Tech, Schaumburg, Ill., has developed the 9000 Conductor Etch Series to support next-generation devices at 20 nm and below that require double-patterning, 3D structures, and complex, high-precision processes.<\/p>\n","protected":false},"author":63082,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[434,450,438,435,436,1],"tags":[],"class_list":["post-4116","post","type-post","status-publish","format-standard","hentry","category-electronics","category-general","category-nanotechnology","category-news","category-news-articles","category-uncategorized"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - 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