{"id":4510,"date":"2014-01-21T21:30:11","date_gmt":"2014-01-21T21:30:11","guid":{"rendered":"https:\/\/staging.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/16970082\/NEWS\/"},"modified":"2023-02-07T04:53:32","modified_gmt":"2023-02-07T04:53:32","slug":"bruker-stylus-profiler-enables-300-mm-wafer-analysis","status":"publish","type":"post","link":"https:\/\/www.asminternational.org\/edfas\/results\/-\/journal_content\/56\/10192\/16970082\/NEWS\/","title":{"rendered":"Bruker stylus profiler enables 300-mm wafer analysis"},"content":{"rendered":"<p>\n\tBruker Nanosurfaces Division, Billerica, Mass., introduces the Dektak XTL Stylus Profiler, extending its stylus profilometry capabilities to 200 and 300 mm semiconductor wafer fabs and next-generation touch panel manufacturers. The system provides the most cost-effective, full 300-mm wafer solution for characterizing thin film step heights, resist step heights, line edge roughness, CMP dishing, erosion, and roll off amount (ROA).<\/p>\n<p>\n\t<span style=\"font-family: Helvetica, Arial, sans-serif; font-size: 0.9375em; line-height: 1.333333333em;\">The Dektak XTL combines decades of stylus innovation with new features targeting QA\/QC environments to enable increased accuracy and minimal operator intervention between loading and unloading samples.<\/span><\/p>\n<p>\n\t<span style=\"font-family: Helvetica, Arial, sans-serif; font-size: 0.9375em; line-height: 1.333333333em;\">It features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it suitable for demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker&#8217;s exclusive Vision64 Advanced Production Interface (API) with pattern recognition optimizes the system for stringent QA\/QC requirements and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.<\/span><\/p>\n<p>\n\t<span style=\"font-family: Helvetica, Arial, sans-serif; font-size: 0.9375em; line-height: 1.333333333em;\">&#8220;Bruker&#8217;s Dektak XTL with a 12-inch stage is the most advanced system in its class,&#8221; said Roger Lee, Integration Department Project Director for China Wafer Level CSP Co., Ltd. (WLCSP). &#8220;The system is stable and reliable, and it incorporates many powerful functionalities and ease-of-use features. Bruker&#8217;s stylus profilers always lead the industry in technology, and they always meet our metrology requirements in production.&#8221;<\/span><\/p>\n<p>\n\t<a href=\"http:\/\/www.bruker-nano.com\/\" style=\"font-family: Helvetica, Arial, sans-serif; font-size: 0.9375em; line-height: 1.333333333em;\">www.bruker-nano.com<\/a><\/p>\n<p>\n\t&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Bruker Nanosurfaces Division, Billerica, Mass., introduces the Dektak XTL Stylus Profiler, extending its stylus profilometry capabilities to 200 and 300 mm semiconductor wafer fabs and next-generation touch panel manufacturers.<\/p>\n","protected":false},"author":63082,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[434,450,438,435,436,1],"tags":[],"class_list":["post-4510","post","type-post","status-publish","format-standard","hentry","category-electronics","category-general","category-nanotechnology","category-news","category-news-articles","category-uncategorized"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - 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