The following individuals were elected to the EDFAS Board of Directors for the September 2014 through August 2018 four-year term:
- Sandra Delgado, Nanolab Technologies
- Susan Li, Spansion, Inc.
- David Su, TSMC
In August the Board nominated and elected officers for the September 2014 through August 2016 two-year term. The EDFAS Officers for this two-year term are:
Positions filled by succession:
- President: Cheryl Hartfield, Oxford Instruments
- Immediate Past President: Jerry A. Walraven, Sandia National Laboratories
Positions filled by vote of the Board of Directors:
- Vice President: Zhiyong Wang, Intel
- Secretary: William E. Vanderlinde, FASM, Laboratory for Physical Sciences
- Finance Officer: Chris Henderson, Semitracks, Inc. (this is a reappointment for one year)
