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MIX microscope observation method combines darkfield with brightfield to detect flaws

February 23, 2018
Source: ASM International

Olympus, Japan, has developed the MX63/MX63L microscopes, which provide MIX observation technology that produces unique observation images by combining darkfield with another observation method, such as brightfield, fluorescence, or polarization. MIX observation enables users to view defects that are difficult to see with conventional microscopes. The circular LED illuminator used for darkfield observation has a directional darkfield function in which only one quadrant is illuminated at a given time. This reduces a sample’s halation and is useful for visualizing surface texture.

With multiple image alignment (MIA), users can stitch images together quickly and easily simply by moving the KY knobs on the manual stage—a motorized stage is not necessary. Olympus Stream software uses pattern recognition to generate a panoramic image, giving users a wider field of view.

Differential interference contrast (DIC) is used to help view samples with minute height differences. It is ideal for inspections of samples having very minute height differences such as magnetic heads, hard-disk media, and polished wafers.

Darkfield is used for detecting minute scratches or flaws on a sample or inspecting samples with mirrored surfaces, such as wafers. MIX illumination enables users to view both patterns and colors.

Fluorescence is used for samples that emit light when illuminated with a specially designed filter cube. This is used to detect contamination and photoresist residue. MIX illumination enables the observation of both the photoresist residue and IC pattern.


Subject Classifications

Materials Testing and Evaluation | Failure Analysis

Materials Testing and Evaluation | Materials Characterization

Materials Testing and Evaluation | Nondestructive Testing

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