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Park XE15 atomic force microscope enables automatic imaging of up to nine samples

Park Systems, Santa Clara, Calif., announces the debut of Park XE15, a powerfully versatile atomic force microscope featuring a unique MultiSample scan. This newly developed large-sample AFM provides researchers and operators with the ability to automatically image and measure up to nine individual samples. It is ideally suited for failure analysis engineers working on wafers. Park XE15 can also easily scan larger samples of up to 200 mm x 200 mm, a great improvement from the current AFM products on the market.

“We continue to set new standards of excellence with our new technology and high accuracy in AFM imaging and measurements,” says Dr. Sang-Il Park, the founder and CEO of Park Systems. “Park XE15 features our most inclusive set of scan modes and can process a range of sample sizes, designed specifically to provide ease of use for shared labs with a wide range of individual requirements.”

Park XE15 is the only AFM that maximizes the efficiency of product use with MultiSample scan, automated imaging of multiple samples in one pass. Specially designed multi-sample chuck holds up to nine individual samples which allows operators to scan the samples under identical environmental conditions, improving the accuracy and reliability of the data. After loading the stage with multiple samples, the scan process can be initiated. This makes it ideal for researchers wanting to scan larger samples or failure analysis engineers who need to place silicon wafers on the stage.

http://www.parkafm.com/product/product_view.php?gubun=R&id=63&Park%20XE15

 

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