Researchers at Argonne National Laboratory, Lemont, Ill., use Polybot, an AI-driven automated material laboratory, to produce high-conductivity, low-defect electronic polymer thin films.
Lifetime of semiconductor processing equipment parts can be checked in real time
Researchers at the Korea Research Institute of Standards and Science have developed a real-time diagnostic system for semiconductor plasma process parts which is expected to enhance yield, stability, and cost efficiency by preemptively preventing contaminant particles generated from component corrosion.






