Imec, Leuven, Belgium, and Excico, Hasselt, Belgium, have successfully demonstrated the application of laser thermal anneal (LTA) to boost the current in vertical polysilicon channel devices for 3D memory. Due to the larger grain size of the laser recrystallized polycrystalline channel material, up to ten times higher read current and 2.5 times steeper sub-threshold slope could be obtained as compared to a conventional polysilicon channel.
Analytical tabletop microscope / Benchtop SEM
Hitachi High-Technologies Corp., Tokyo, launched the tabletop microscope TM3030, which enables observation of even higher resolution images than previous models. It features a short start-up time of around 3 min. while low-vacuum microscopy functionality allows sample observations to be performed quickly without prior processing. Its compact size allows it to be conveniently installed and operated on tables in offices and other locations.
TESCAN merges with Orsay Physics to form TESCAN-ORSAY
TESCAN (Brno, Czech Republic) a leading global supplier of scanning electron microscopes and focused ion beam workstations, and ORSAY PHYSICS, a world leader in customized focused ion beam and electron beam technology, have merged to form TESCAN-ORSAY HOLDING. Cooperating since 2007, Orsay Physics has been the sole supplier of ion beam technology to TESCAN.
Revolutionizing transmission electron microscopy
FEI, Hillsboro, Ore., introduced three new systems that tailor the power of transmission electron microscopy (TEM) to specific application and industry needs. The new systems launched today provide efficient and effective application-specific workflows for semiconductor manufacturing and scientific research.
Kronos cell characterization platforms now include embedded memories
Mentor Graphics Corp., Wilsonville, Ore., has expanded the Kronos Cell Characterization and Analysis platform to include embedded memories. The platform quickly produces accurate performance models for standard cells, I/Os, complex cells, and embedded memories within an advanced, integrated environment. The Kronos Platform’s advanced algorithms and efficient job distribution reduces characterization time from weeks to days.