Three-dimensional SEM metrology for 10 nm structures

Researchers at the National Institute of Standards and Technology’s (NIST) Physical Measurement Laboratory (PML), Gaithersburg, Md., have devised an idea for determining the 3D shape of features as small as 10 nm wide.

Ipsen reports increase in hot zone and retrofit orders

Ipsen USA, Cherry Valley, Ill. , reports that in the first quarter of 2014, its Engineered Components Group has seen a large increase in vacuum and atmosphere furnace hot-zone and retrofit orders compared to the same period in 2013.