Failure Analysis and Defect Inspection of HEMTs and Other Compound Semiconductor Structures by High Resolution Cathodoluminescence

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Social - 6:00pm - 6:40pm (food and drink will be provided)
General business meeting - 6:40pm - 6:55pm
Technical presentations - 7:00pm

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EDFAS Lonestar January Meeting
Wednesday, Jan 24, 2018
6:00 pm  |  Central Daylight Time (Chicago, GMT-05:00)  |  1 hr
Meeting number: TBA
Meeting password: TBA

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Lonestar EDFAS meeting, January 24, 2018 at Microtech Analytical Labs

January 24, 2018 | Microtech Analytical Labs 538 Haggard St. STE 402 Plano, TX 75074. Across the street from the Comfort Suites; see Map link

Plano , TX , United States

Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over a large field of view with unprecedented spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission, opens a new pathway in non-destructive failure and defect analysis on the nanometer scale. Here we present applications of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials.

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