Web Content Display

Lonestar EDFAS meeting, January 24, 2018 at Microtech Analytical Labs

  • January 24, 2018
  • Microtech Analytical Labs 538 Haggard St. STE 402 Plano, TX 75074. Across the street from the Comfort Suites; see Map link
  • Plano , TX , United States


Failure Analysis and Defect Inspection of HEMTs and Other Compound Semiconductor Structures by High Resolution Cathodoluminescence
Christian Monachon and Sylvain Muckenhirn (they each will present approximately half) Attolight AG, Lausanne, Switzerland
Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over a large field of view with unprecedented spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission, opens a new pathway in non-destructive failure and defect analysis on the nanometer scale. Here we present applications of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials.

Further Your Knowledge


Practical Interpretation of Microstructures, January 21-24, 2019

Jan 21, 2019 - Jan 24, 2019

Ms. Frauke Houge, FASM

Allied High Tech,
2376 E. Pacifica Pl. Compton, CA, USA

Practical Interpretation of Microstructures, October 8-10, 2018

Oct 08, 2018 - Oct 10, 2018

Dr. Daniel P. Dennies PhD, FASM

ASM World Headquarters - Materials Park,
Novelty, OH, USA

Practical Interpretation of Microstructures, August 5-8, 2019

Aug 05, 2019 - Aug 08, 2019

Ms. Frauke Hogue, FASM

ASM World Headquarters - Materials Park,
Novelty, OH, USA