angle-left

Web Content Display

Lonestar EDFAS meeting, January 24, 2018 at Microtech Analytical Labs

  • January 24, 2018
  • Microtech Analytical Labs 538 Haggard St. STE 402 Plano, TX 75074. Across the street from the Comfort Suites; see Map link
  • Plano , TX , United States

Description

Failure Analysis and Defect Inspection of HEMTs and Other Compound Semiconductor Structures by High Resolution Cathodoluminescence
 
Presenters:
Christian Monachon and Sylvain Muckenhirn (they each will present approximately half) Attolight AG, Lausanne, Switzerland
 
Abstract:
Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over a large field of view with unprecedented spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission, opens a new pathway in non-destructive failure and defect analysis on the nanometer scale. Here we present applications of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials.

Further Your Knowledge


MATERIAL RESOURCES

Practical Interpretation of Microstructures, January 21-24, 2019

Jan 21, 2019 - Jan 24, 2019

Ms. Frauke Houge, FASM

Allied High Tech,
2376 E. Pacifica Pl. Compton, CA, USA

Practical Interpretation of Microstructures, October 8-10, 2018

Oct 08, 2018 - Oct 10, 2018

Dr. Daniel P. Dennies PhD, FASM

ASM World Headquarters - Materials Park,
Novelty, OH, USA

Practical Interpretation of Microstructures, August 5-8, 2019

Aug 05, 2019 - Aug 08, 2019

Ms. Frauke Hogue, FASM

ASM World Headquarters - Materials Park,
Novelty, OH, USA