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Lonestar EDFAS meeting, January 24, 2018 at Microtech Analytical Labs

  • January 24, 2018
  • Microtech Analytical Labs 538 Haggard St. STE 402 Plano, TX 75074. Across the street from the Comfort Suites; see Map link
  • Plano , TX , United States

Description

Failure Analysis and Defect Inspection of HEMTs and Other Compound Semiconductor Structures by High Resolution Cathodoluminescence
 
Presenters:
Christian Monachon and Sylvain Muckenhirn (they each will present approximately half) Attolight AG, Lausanne, Switzerland
 
Abstract:
Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over a large field of view with unprecedented spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission, opens a new pathway in non-destructive failure and defect analysis on the nanometer scale. Here we present applications of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials.

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