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High Current Focused Ion Beam Instrument for Destructive Physical Analysis Applications

Author: P. Tesch, Oregon Physics LLC; N. Smith, Oregon Physics LLC; N. Martin, Oregon Physics LLC; D. Kinion, Oregon Physics LLC   |   Document Download   |   Product code: ZCP2008ISTFA007

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Conventional focused ion beams (FIB) employing liquid metal ion sources (LMIS) are commonly used to create site specific cross-sections for viewing subsurface features and performing 3D metrology on subsurface structures. These FIB tools are typically used to remove material with volumes from 0.1 µm3 to 1x104 µm3 with high cross-section edge placement accuracy. These tools are very effective at creating cross-sections for failure analysis or yield improvement on structures with dimensions below 25µm. For instance, LMIS FIB tools commonly create cross-sections for measuring critical dimensions on magnetic hard drive heads to optimize production yields. LMIS FIB tools are also used to create thin lamella cross-sections for Scanning Transmission Electron Microscopy analysis. In both these cases the cross-sections are typically less than 10 microns in any dimension.

  • From: ISTFA 2008: Conference Proceedings from the 34th International Symposium for Testing and Failure Analysis (ASM International)
  • Published: November 01, 2008
  • Pages: 7