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Wafer Level Failure Analysis Process Flow

Author: J. H. Lee, Y.S. Huang, D.H. Su Taiwan Semiconductor Manufacturing Company   |   Document Download   |   Product code: ZMEFA2011P049

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Failure analysis (FA) plays a very important role in the integrated circuit industry, in particular, wafer level FA constitutes a large portion of the daily work of FA engineers in a fab. In this section, we present a commonly used process flow for performing good, thorough wafer level FA.
  • From: Microelectronics Failure Analysis, Desk Reference Sixth Edition
  • Published: October 01, 2011
  • Pages: 3
  • Review Type: Peer reviewed