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Beam-Based Defect Localization Techniques

Author: Edward I. Cole Jr., Sandia National Laboratories   |   Document Download   |   Product code: ZMEFA2011P246

File size: 2 MB

Classified as: Electronic Materials Electronics

Price: $25.00 Member Price: $20.00
SEM and SOM techniques for IC analysis that take advantage of "active injection" are reviewed. Active injection refers to techniques that alter the electrical characteristics of the device analyzed. All of these techniques can be performed on a standard SEM or with a SOM using the proper laser wavelengths.
  • From: Microelectronics Failure Analysis, Desk Reference Sixth Edition
  • Published: October 01, 2011
  • Pages: 17
  • Review Type: Peer reviewed