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Energy Dispersive X-ray Analysis

Author: W. Vanderlinde, Laboratory for Physical Sciences   |   Document Download   |   Product code: ZMEFA2011P549

File size: 1 MB

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By far the most common micro-analytical technique in the failure analysis laboratory is energy dispersive x-ray spectroscopy, known as EDX or EDS. It is commonly available because it is relatively cheap and easy to add an xray detector to a scanning electron microscope. However, EDS lacks the lateral spatial resolution, depth resolution and sensitivity of many other techniques. Nevertheless, with careful analysis EDS can measure many elements down to a composition of about 0.1%, or with spatial resolution and depth sensitivity of 1 micron or less, so it is a reasonably powerful technique for many failure analysis problems.
  • From: Microelectronics Failure Analysis, Desk Reference Sixth Edition
  • Published: October 01, 2011
  • Pages: 12
  • Review Type: Peer reviewed