Hitachi High Technologies America Inc., Schaumburg, Ill., has released the FlexSEM 1000, a compact SEM system with a minimized, lab-friendly footprint, 6 to 100 Pa variable pressure, and 4 nm resolution, while offering superior ease of use for operators of all skill levels. The FlexSEM 1000 has achieved 4-nm resolution by including a newly designed electrical optical system and a high-sensitivity detector, normally used in high-end models with proven reliability.
In recent years, the demand for fine surface structure observation has increased and expanded the usage of SEMs to production sites, inspection sites, and offices. This in turn has created a need for a compact instrument that fits in a limited space.
The main unit of the newly released FlexSEM 1000 has dimensions of 450 x 640 mm, and is 52% more compact, 45% lighter, and 50% more energy-efficient than the current model, the SU1510. Also, it only requires a standard wall outlet for power (AC100V 3P). The main unit can be separated from the power supply unit for additional space-saving and flexible system placement.
The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience levels. Specifically, the new and enhanced navigation function, SEM MAP, helps locate the regions of interest quickly, and delivers accurate correlated optical and SEM images with only one click.
http://www.hitachi-hightech.com/us/product_detail/?pn=em-flexsem1000
