Weber Ultrasonics, Germany, has developed the intelligent SonoPower 3S megasound system with frequencies from 500 to 1000 kHz for cleaning sensitive components such as monocrystalline wafers in the semiconductor industry.
The system consists of the intelligent SonoPower 3S Megasonic Boost and the matching SonoPlate HF high-frequency transducers. The generator has various innovative features to ensure that cleaning is gentle on the surface while contaminants are removed reliably. These include combined frequency and amplitude modulation, which guarantees homogeneous sound fields and thus prevents standing waves.
The SonoScan automatically determines and sets the optimum operating frequency, and monitors and adjusts it during the process. This guarantees that the ideal power output is always applied, even during changing operating conditions such as temperature fluctuations or when cleaning and rinsing media are changed. Adjustments are made during running operation, which ensures uninterrupted operation.
Another special feature of the is the mains voltage management. As it automatically compensates for voltage fluctuations, maximum process stability and operational reliability are guaranteed. Power output can be continually adjusted from 10 to 100 percent, which allows it to be ideally adapted to the respective component.
The SonoPower 3S Megasonic Boost is Industry 4.0-compatible. Optional Profinet interface integrated in the generator enables remote operation, whereby the ultrasound-specific process parameters are precisely controlled and documented during cleaning. Another advantage is the compact design, which enables it to be easily integrated into 19-inch control cabinets.
Optimally adapted to the generator, the new SonoPlate HF high-frequency transducers enable an effective cavitation current and thereby efficient further processing of the clean components. The transducers are tailored to the standard dimensions of the wafer industry as standard, and can also be produced in other sizes upon request.
