Laser FIB on Zeiss Crossbeam 350/550 enables access to deeply buried structures

April 17, 2020
Source: ASM International

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Zeiss, Germany, announces that researchers who perform multi-scale, correlative studies using X-ray microscopy data to drive FIB-SEM site selections, today can further enhance their workflows: the newly introduced, patented LaserFIB on Zeiss Crossbeam 350/550 enables the access of deeply buried structures in addition to rapid, gallium free structure fabrication over large length scales.

Users can perform laser work in a dedicated chamber to avoid contamination of the main instrument. A next-generation femtosecond laser added to the airlock provides massive material ablation in a short time, while virtually eliminating laser-induced heat effects. The new tool is up to 50 times faster for large volume removal than equivalent workflows using a plasma ion source.

The LaserFIB can be used to produce structures such as cantilevers, pillars for nanomechanical testing, and for sample preparation in the Zeiss Xradia Ultra X-ray microscope. Further applications are the creation of large cross sections for EBSD (electron backscattered diffraction) studies or whole TEM grids with guaranteed gallium free results.

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