ClassOne Technology, Kalispell, Mont., has launched its Solstice line of electroplating tools designed specifically for 100 to 200-mm substrates. The plating equipment enables multiple types of metal deposition with chemical pre-wet, etch, rinse, and drying processes, all on a single-wafer automated system, and all driven by the long-proven Solaris controller on a Windows 7 platform. The result is state-of-the-art plating performance in a flexible, modern tool that’s designed for smaller users and emerging technologies.
It is said to be the first automated plating tool that can deliver advanced performance on smaller substrates, at a price less than half that of equivalent 300mmtools from the large manufacturers.
“The bigger equipment companies have focused on building ever-smaller devices on ever-larger substrates,” says ClassOne’s VP of technology Kevin Witt. “They’ve been serving the market segment that buys expensive high-end tools — but they’ve left the cost-conscious people behind. Until now, the smaller-substrate users either had to buy used equipment or pay top dollar to get the big manufacturers to build them a 200mm-or-smaller plating tool.”
The Solstice is available in two models. The fully automated cassette-to-cassette Solstice S8 provides up to eight process chambers for throughputs up to 75wph (wafers per hour), with system prices starting at $1m. The semi-automated Solstice LT features one or two chambers for development and pilot lines, with systems starting at $350,000. So, emerging technology users now have an affordable, scalable path from wet bench to volume production and higher return on investment.
