Sematech, Albany, N.Y., and Exogenesis Corp., Billerica, Mass., have agreed to a strategic alliance to commercialize the Exogenesis Accelerated Neutral Atom Beam (ANAB) process technology and the nAccel accelerated particle beam equipment platform. The two companies will form a new company to bring ANAB technology to market for the semiconductor industry. Beyond the initial focus on integrated circuit manufacturing, the partners will explore ANAB applications in other nanoelectronics fields, which may lead to the formation of additional companies.
“The chip industry is in the era of atomic-scale processing. The applications of ANAB being developed will enable more efficient manufacturing and open up new functionality for semiconductor devices,” said Ron Goldblatt, Ph.D., Sematech CEO and President.
ANAB technology is a unique, patented approach to modifying and controlling surfaces with atomic level control at a depth of a few nanometers. “There is no other technology that offers the performance profile of ANAB,” says Richard Svrluga, President and CEO of Exogenesis. Chemical modification, material removal and deposition, surface smoothing and control of surface morphology are all possible with the ANAB platform.
ANAB is already being used in the biomedical field for precise control of pharmacological and biointegration properties and to enable development of more safe and efficacious implantable medical devices. ANAB has been demonstrated to provide benefits to the surfaces of a wide
