Oxford Instruments, U.K., offers LayerProbe, a software tool for thin film analysis in the SEM that is said to be faster and more cost-effective, with higher resolution than dedicated thin film measurement tools. An option for the AZtec EDS microanalysis system, LayerProbe complements the elemental and phase information gained from conventional EDS analysis by also calculating the composition and thickness of the individual layers beneath the surface.
The system is based on a highly focused electron beam to analyze the system. This means that the analysis is spatially resolved laterally as well as with depth; therefore, nanoscale thin film structures can be measured.
With this X-ray based technique, metallic films can be measured at thicknesses far beyond their optical transparency. The excellent low energy sensitivity of Oxford’s latest generation SDD detector, X-MaxN, makes it possible to measure oxide formation on metals down to 1 nm thickness. LayerProbe takes only seconds to characterize the lamella thickness and to detect and measure any implanted Gallium
The software enables characterizing multiple layers beneath the surface of the specimen, providing nondestructive analysis. It provides thickness and composition of multiple layers from 2 nm to 2000 nm, with lateral resolution down to 200 nm. It is easy to set-up for the routine user, and is a cost effective extension of a SEM or FIB-SEM. It is an extension to AZtecEnergy: seamlessly integrated and easily retrofittable to existing installations.
Operators can measure thickness and composition of metallization and dielectric layers; accurately characterize oxide formation on bond pads (e.g. Cu oxide on Cu); and optimize thin film deposition processes (CVD, ALD, sputtering, evaporation).
https://www.oxford-instruments.com/search-results?q=layerprobe
