Thermo Scientific, Waltham, Mass., has developed the Meridian 7 system, which provides visible laser voltage imaging and probing, as well as dynamic laser stimulation on sub-10nm devices. By avoiding a requirement for ultra-thin substrates, it preserves the integrity and functionality of the device under test to provide a reliable and practical production solution.
It offers a 25 percent optical resolution enhancement over the previous-generation system, and has a smaller spot size for better fault localization. In addition, the new Meridian 7 system offers more certainty in navigation and computer-aided design (CAD) overlay, less cross-talk, and higher waveform signal-to-noise.
Key benefits: Dynamic optical fault isolation for 10nm node and below; Bandwidth is 7 GHz for at-speed tests; High resolution visible and Infrared light; High-yield sample preparation to 5μm widely available
https://www.fei.com/products/efa/Meridian-7-for-Semiconductors/
