Bruker Nano Surfaces, Billerica, Mass., has joined Sematech, Albany, N.Y., to develop new semiconductor defect characterization solutions for advanced materials development. The collaboration will generate the first detailed information database that allows Bruker’s patented PeakForce QNM mechanical force data to be correlated to nanoparticle materials. As a member, Bruker will collaborate with metrology experts at Sematech to develop high-resolution atomic force microscope-based defect analysis capabilities.
This will be linked to material data provided by transmission electron microscopy analysis with advanced energy dispersive X-ray spectroscopy and electron energy loss spectroscopy. These techniques will provide the high resolution imaging and compositional data on the scale of a few nanometers, which is invaluable for in-line defect analysis.
“SEMATECH will be able to maximize the capability of high resolution imaging and analytical data output for next generation semiconductor devices with Brukers unique quantitative nanomechanical data based on PeakForce Tapping technology,” said Mark R. Munch, Ph.D., President, Bruker MAT Group and Bruker Nano Surfaces Division. “Partnering with Sematech will enable us to provide detailed information about mechanical properties that can be combined with atomic arrangement, chemical bonding, density, and electronic behavior on a nanometer scale. The result is a much more complete profile of each material than would have been possible without AFM.”
