Centorr Vacuum Industries, Nashua, N.H., has shipped orders for two high-temperature sintering furnaces for 2015 delivery to a leading firm in the production of aluminum nitride substrates for the LED market in China. The designs include a 2 ft3 graphite furnace for AlN sintering, and a refractory metal furnace rated to 1850°C for a secondary heating process. These new furnaces build on the success of CVI’s experience in non-oxide ceramics, and include modifications made specifically for high-temperature sintering of advanced ceramics.
The graphite furnace includes robust graphite tube and block elements designed for service to 2250°C, with a four-sided hot zone and integral graphite retort for excellent temperature uniformity.
The rigid graphite insulation provides for long-term service even in the presence of process off-gassing and residual binder contamination. The new dual-flow Sweepgas system allows more effective “sweeping” away of the process offgassing. Furnace control is via PLC/Programmable Controllers with Centorr’s custom-designed HMI visualization interface.
Centorr’s Sintervac Non-Oxide furnace is available with volumes of 2, 3, 4.5, 9, 16, 24, and 54 cubic feet. The refractory metal furnace, sized at one cubic foot, will be used for a specific part of the AlN process in which a non-graphite hot zone is needed for material cleanliness. The system is rated to 1850°C and offers temperature uniformity under +/- 3°C.
