Hitachi High-Technologies Corp., Japan, has released the NX9000 real-time 3D analytical FIB 1-SEM 2 composite instrument. It features improved 3D structural analysis precision and throughput. FIBs are becoming an essential tool in cross-sectional SEM observation and TEM 3 analysis, as they are able to prepare cross sections at specified positions as well as ultra-thin lamellas. Automatic repetition of FIB cross-section preparation and SEM observation provide a series of cross sectional images enabling 3D structural analysis of a specified microscopic section.
In the NX9000, the SEM column and FIB column are arranged orthogonally rather than the usual diagonal configuration. This configuration is optimal for 3D structural analysis. It avoids the issues that affected conventional FIB-SEM composite instruments, namely shrinking of cross-sectional SEM images and non-alignment of the visual field on recovery of an image series. This enables stable collection of images that faithfully represent the true structure of the sample. A high brightness cold field emission electron source and high sensitivity detection system, which have a well-established reputation among customers, provide high contrast, high resolution observation of a wide variety of samples, from biological tissue to magnetic samples such as steel.
Moreover, combining EDS 4 and EBSD 5 enable evaluation of the 3D distribution of elements and crystal orientation. These features have made possible high precision 3D structural analysis that had previously been difficult to achieve. The NX9000 will contribute to development of new materials and devices, and new understanding of biological functions.
