Acxys Technologies, France, has introduced its UL-Coat (ULC) module, which injects a precursor into plasma generated by its ULS plasma spot module, thus enabling deposition of thin films of SiOx in open air. The deposition hardware is based on the ULS design and receives an add-on part allowing precursor injection.
The new system works without any moving parts, resulting in a good reliability and extreme precision in achieving the coatings. The ULC module can coat uniformly up to 400 nm thick at a rate of one cm²/s per nozzle. A multi-torch version of the ULC is currently under development to coat large surfaces at high speed.
The standard module is designed for depositing non-stochiometric silicon oxide (SiOx) using an organic metal precursor. Other film compositions can be studied. The Acxys Process Development Lab offers R&D outsourcing and will tailor customer applications through a development contract.
With application possible on any material, this coating can be used to build protective layers for high-value applications such as corrosion and scratch prevention for markets such as microelectronics, watchmaking, or medical equipment. This technology is easy to set up and is cost effective compared to traditional vacuum deposition solutions.
The new ULC Module now enables excellent control of process parameters. The new system has no moving parts, resulting in a good reliability and extreme precision in achieving the coatings.
http://www.acxys.com/news/178-new-ulc-injection-module-for-thin-film-coating.html
