Progressive Surface, Grand Rapids, Mich., recently installed three 100HE plasma spray systems at a semiconductor industry facility. These systems are designed to spray very thin but dense yttrium oxide (Y2O3) coatings by the suspension plasma spray technique. Each system includes the LiquiFeederHE suspension feed unit and the 100HE plasma torch. The system yields coatings with excellent microstructures. The as-sprayed Ra surface roughness achieved is typically in the 40 µ-inch (1 µm) range.
The 100HE plasma torch features a patented arc root stabilization technology, and efficient use of ternary gas mixtures (Ar, N2 & H2, or He) results in a high-performance plasma coating. Able to apply plasma spray powders in axial, radial, or external injection modes, the 100HE produces superior plasma coatings applied at higher spray rates and significantly higher deposition efficiencies.
