CyberOptics Corp., Minneapolis, Minn., announces that it has won the 2019 Best of West award for the new NanoResolution MRS (Multi-Reflection Suppression) sensor, which “meticulously identifies and rejects multiple reflections caused by shiny components and mirror-like surfaces.” SEMI, the global industry association representing the electronics manufacturing and design supply chain, and Semiconductor Digest presented the award during Semicon West in San Francisco on July 11.
Effective suppression of multiple reflections is critical for highly accurate measurements. “There’s a big emphasis on metrology at this year’s SEMICON West,” said Pete Singer, editor in chief of Semiconductor Digest. “The CyberOptics MRS Sensor is a great example of a fantastic new tool now available to semiconductor manufacturers.”
The 3-micron NanoResolution MRS sensor (X/Y resolution of 3 micron, Z resolution of 50 nanometer) enables metrology grade accuracy with superior 100% 2D and 3D inspection performance for features as small as 25-microns. It is also two to three times faster than alternate solutions in the marketplace. With data processing speeds in excess of 75 million 3D points per second, it delivers throughput greater than 25 wafers (300mm) per hour. 100% 2D and 3D inspection can be completed simultaneously at high speed, versus an alternate, slow method that requires two separate scans for 2D and 3D, and only a sampling of a few dies of the 25 wafers.
The new NanoResolution MRS sensor is ideally suited for the inspection of CPU sockets, IC package, solder balls and bumps, copper pillars, and other advanced packaging and mid-end semiconductor applications where high precision and speed are needed.
