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Lindberg MPH mesh-belt conveyor furnace designed for microelectronics processing

Lindberg MPH, Riverside, Mich., has shipped an electric mesh-belt conveyor furnace with a nitrogen/hydrogen blend atmosphere to a microelectronics manufacturer in the United States. The special atmosphere in the heating-section muffle reaches process temperatures up to 1000°C (1832°F). The combustible gas system provides a timed nitrogen-gas purge of the muffle before process gas can be introduced into the furnace muffle.

The overall size of the furnace is 201 inches by 40.75 inches by 52 inches, with an exhaust height of 84 inches. The furnace has a four-foot heated section and 24 inches of copper-tubing-wrapped water-cooling chamber, plus an additional 12 inches of copper-tubing-wrapped cooling on the exit purge chamber.

According to Business Development Manager Bill St. Thomas, “This equipment is based on a standard Lindberg/MPH Model 830MT continuous mesh belt conveyor furnace, with alterations made to the customer’s specifications in regard to equipment work height, overall length, and extending the muffle by six inches.”

www.lindbergmph.com 

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