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Brewer Science wins award from SEMI for anti-reflective coatings in optical lithography

Brewer Science Inc., San Jose, Calif., was honored as the recipient of the 2014 SEMI award for North America for his impact on the manufacturing of integrated circuits in the semiconductor industry. Dr. Terry Brewer, founder and president of the company, introduced anti-reflective coatings in optical lithography in 1981. ARC anti-reflective coatings improve the photolithographic process, enabling fine resolution of photoresist features. The image compares the uncoated device on the left with a coated device on the right.

This development opened the pathway for the industry’s shift from g-line to 248-nm to 193-nm lithography, and now to extreme ultraviolet and directed self-assembly technology.

The SEMI Award recognizes outstanding technical achievement and meritorious contribution and is the highest honor conferred by SEMI.

“Thank you. I am pleased and honored to receive recognition from SEMI and the industry,” said Dr. Brewer. “Brewer Science has a long history of challenging accepted ideas and making meaningful changes. As a result, we have shattered industry biases, mentored entrepreneurs, and pioneered STEM education to embrace a unique business model that rewards non-traditional thinking. This has led to significant new products and processes for our industry.”

www.brewerscience.com

 

 

 

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